@article{774896,
  author = {B Newell and Michael Postek and J VanDerZiel},
  title = {Fabrication Issues for the Prototype NIST SRM 2090A SEM Magnification Calibration Standard},
  year = {1995},
  number = {13(6)},
  month = {1995-11-01 00:11:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}