@conference{774766,
  author = {John Villarrubia and B Bunday},
  title = {Unbiased Estimation of Linewidth Roughness},
  year = {2005},
  number = {5752},
  month = {2005-05-01 00:05:00},
  publisher = {Proceedings of SPIE, San Jose, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822373},
  language = {en},
}