@article{772141,
  author = {John Villarrubia and Andras Vladar and Michael Postek},
  title = {Scanning electron microscope dimensional metrology using a model-based library},
  year = {2005},
  number = {37(11)},
  month = {2005-11-01 00:11:00},
  publisher = {Surface and Interface Analysis},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822537},
  language = {en},
}