@book{771731,
  author = {Robert Larrabee and Michael Postek},
  title = {Parameters Characterizing a Critical Dimension Measurement},
  year = {1994},
  number = {CR52},
  month = {1994-12-01 00:12:00},
  publisher = {SPIE-International Society for Optical Engineering, Bellingham, WA},
  language = {en},
}