@book{771666,
  author = {T Mcwaid and J Schneir and John Villarrubia and Ronald Dixson and V Tsai},
  title = {Progress Towards Accurate Metrology Using Atomic Force Microscopy},
  year = {1996},
  month = {1996-01-01 00:01:00},
  publisher = {AIP Press, New York, NY},
  language = {en},
}