@conference{771541,
  author = {Michael Postek and Andras Vladar and G Banke and T Reilly},
  title = {Workshop Report 1: Scanning Electron Microscope Metrology as Related to a Defined Edge Structure},
  year = {1995},
  month = {1995-01-01 00:01:00},
  publisher = {Proceedings MAS, Breckinridge, CO, USA},
  language = {en},
}