@conference{771501,
  author = {L Linholm and Robert Allen and Michael Cresswell and Rathindra Ghoshtagore and S Mayo and H Schafft and John Kramar},
  title = {Measurement of Patterned Film Linewidth for Interconnect Characterization},
  year = {1995},
  month = {1995-01-01 00:01:00},
  publisher = {Proceedings of IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA},
  language = {en},
}