@conference{771486,
  author = {J Schneir and T Mcwaid and Theodore Vorburger},
  title = {An Instrument for Calibrating Atomic Force Microscope Standards},
  year = {1994},
  number = {2196},
  month = {1994-05-01 00:05:00},
  publisher = {Proceedings of SPIE, San Jose, CA, USA},
  language = {en},
}