@conference{767581,
  author = {D. Lichtenwalner and A. Anderson and David Rudman},
  title = {Use of Ion Scattering Spectroscopy to Monitor the Nb Target Mitridation During Reactive Sputtering},
  year = {1991},
  month = {1991-12-31 00:12:00},
  publisher = {Proc., Mater. Soc. Symp.;121, Issue 613, Undefined},
  language = {en},
}