@article{766916,
  author = {H. Li and Ronald Ono and Leila Vale and David Rudman and Sy-hwang Liou},
  title = {A Novel Multilayer Circuit Process Using YBa<sub>2</sub>Cu<sub>3</sub>O<sub>x</sub>/SrTiO<sub>3</sub> Thin Films Patterned by Wet Etching and Ion Milling},
  year = {1996},
  number = {69},
  month = {1996-10-01 00:10:00},
  publisher = {Applied Physics Letters},
  language = {en},
}