@conference{766156,
  author = {Loren Linholm and Richard Allen and Michael Cresswell and Rathindra Ghoshtagore and Santos Mayo and Harry Schafft and John Kramar and E Teague},
  title = {Measurement of Patterned Film Linewidth for Interconnect Characterization},
  year = {1995},
  number = {8},
  month = {1995-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16737},
  language = {en},
}