@article{764646,
  author = {Gene Hilton and James Beall and Steven Deiker and Joern Beyer and Leila Vale and Joel Ullom and Kent Irwin},
  title = {Surface Micromachining for Transition-Edge Detectors},
  year = {2003},
  number = {13},
  month = {2003-06-01 00:06:00},
  publisher = {IEEE Transactions on Applied Superconductivity},
  language = {en},
}