@conference{764581, author = {Muhammad Afridi and David Berning and Allen Hefner Jr. and John Suehle and Mona Zaghloul and Eric Kelley and Zharadeen Parrilla and Colleen Hood}, title = {Transient Heating Study of Microhotplates by Using a High-Speed Thermal Imaging System}, year = {2002}, month = {2002-03-01 00:03:00}, publisher = {Proc., SEMI-THERM , San Jose, CA, USA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=14143}, language = {en}, }