@article{764576,
  author = {Joseph Rice and David Rudman and C. Bang and M. Flik and M. Schmidt},
  title = {Thermal Isolation of High-Temperature Superconducting Thin Films Using Silicon Wafer Bonding and Micromachining},
  year = {1993},
  number = {2},
  month = {1993-12-01 00:12:00},
  publisher = {Journal of Microelectromechanical Systems},
  language = {en},
}