@article{759936,
  author = {Yicheng Wang and Martin Misakian and Amanda Goyettes and James Olthoff},
  title = {Ion Fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C<sub>2</sub>F<sub>6</sub> and c-C<sub>4</sub>F<sub>8</sub>},
  year = {2000},
  month = {2000-11-01 00:11:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=773},
  language = {en},
}