@article{756386,
  author = {M Calleja and J Anguita and R Garcia and K Birkelund and F Perez-murano and John Dagata},
  title = {Nanometre-scale Oxidation of Silicon Surfaces by Dynamic Force Microscopy: Reproducibility, Kinetics and Nanofabrication},
  year = {1999},
  number = {10(1)},
  month = {1999-03-01 00:03:00},
  publisher = {Nanotechnology},
  language = {en},
}