@conference{756226,
  author = {Robert Larrabee and Richard Silver and M Davidson},
  title = {Optical Linewidth Models: Then and Now},
  year = {1999},
  number = {3677},
  month = {1999-06-01 00:06:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA, USA},
  language = {en},
}