@article{7541,
  author = {Ann Chiaramonti and Sten Vollebregt and Johan van and Kees Beenakker and R. Ishihara},
  title = {Towards the Integration of Carbon Nanotubes as Vias in Monolithic 3D Integrated Circuits},
  year = {2013},
  month = {2013-03-21},
  publisher = {Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers},
  language = {en},
}