@conference{70656,
  author = {Kevin Lyons and Michael Postek},
  title = {A Decade of Commitment from the NIST Manufacturing Engineering Laboratory to Nanomanufacturing and Nanometrology},
  year = {2009},
  month = {2009-08-27},
  publisher = {Proceedings of the SPIE Optics and Photonics NanoScience and Engineering Conference 2009, San Diego, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902648},
  language = {en},
}