@article{69296,
  author = {Emre Yarimbiyik and Harry Schafft and Richard Allen and Mark Vaudin and Mona Zaghloul},
  title = {Experimental and Simulation Studies of Resistivity of Nanoscale Copper Films},
  year = {2009},
  number = {49},
  month = {2009-02-19},
  publisher = {Microelectronics Reliability},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32595},
  language = {en},
}