@conference{68686,
  author = {Heather Patrick and Thomas Germer and Michael Cresswell and Bin Li and Huai Huang and Paul Ho},
  title = {Extraction of trench geometry and linewidth of nanoscale grating targets in (110)-oriented silicon using angle-resolved scatterometry},
  year = {2008},
  month = {2008-06-09},
  publisher = {Proceedings of the SPIE Conference on Optics and Photonics | 2008 |, San Diego, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842548},
  language = {en},
}