@article{67011,
  author = {Heather Patrick and Ravikiran Attota and Bryan Barnes and Thomas Germer and Michael Stocker and Richard Silver and Michael Bishop},
  title = {Optical Critical Dimension Measurement of Silicon Grating Targets Using Back Focal Plane Scatterfield Microscopy},
  year = {2008},
  number = {7},
  month = {2008-01-02},
  publisher = {Journal of Microlithography Microfabrication and Microsystems},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841060},
  language = {en},
}