@article{66591, author = {Mark Vaudin and Yvonne Gerbig and Stephan Stranick and Robert Cook}, title = {Comparison of Nanoscale Measurements of Strain and Stress using Electron Back Scattered Diffraction and Confocal Raman Microscopy}, year = {2008}, number = {93}, month = {2008-12-12}, publisher = {Applied Physics Letters}, language = {en}, }