@article{64271, author = {Cedric Powell and Aleksander Jablonski}, title = {Effects of Elastic-Electron Scattering on Measurements of Silicon Dioxide Film Thicknesses by X-Ray Photoelectron Spectroscopy}, year = {2001}, number = {114-116}, month = {2001-03-01}, publisher = {Journal of Electron Spectroscopy and Related Phenomena}, language = {en}, }