@article{64206,
  author = {Cedric Powell and Aleksander Jablonski},
  title = {Influence of Elastic-Electron Scattering on Measurements of Sillicon Dioxide Film Thicknesses by X-Ray Photoelectron Spectroscopy},
  year = {2001},
  number = {19},
  month = {2001-09-01},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}