@conference{5941,
  author = {Mark and Richard Silver and Nien Zhang and Hui Zhou and Bryan Barnes and Bin Ming and Andras Vladar and John Villarrubia},
  title = {Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression},
  year = {2015},
  number = {9424},
  month = {2015-03-19},
  publisher = {Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA},
  doi = {https://doi.org/10.1117/12.2175653},
  language = {en},
}