@conference{57171,
  author = {Thomas Germer and Heather Patrick},
  title = {Effect of Bandwidth and Numerical Aperture in Optical Scatterometry},
  year = {2010},
  month = {2010-03-01},
  publisher = {Metrology, Inspection, and Process Control for Microlithography XXIV, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905013},
  language = {en},
}