@conference{56781,
  author = {Ronald Dixson and Ndubuisi Orji and B Bunday and J Allgair},
  title = {Accuracy Considerations for Critical Dimension Semiconductor Metrology},
  year = {2008},
  number = {7042},
  month = {2008-09-09},
  publisher = {Instrumentation, Metrology, and Standards for Nanomanufacturing II
Proceedings of SPIE Volume 7042  
, San Diego, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824699},
  language = {en},
}