@conference{56541, author = {David Read and Roy Geiss}, title = {Thermal Cycling of Buried Damascene Copper Interconnect Lines by Joule Heating}, year = {2008}, month = {2008-01-01}, publisher = {NSTI Nanotech 2008 Proceedings, Boston, MA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853561}, language = {en}, }