@article{55521,
  author = {A Bard and K Berggren and J Wilbur and John Gillaspy and S Rolston and Jabez McClelland and William Phillips and M Prentiss and G Whitesides},
  title = {Self-Assembled Monolayers Exposed by Metastable Argon and Metastable Helium for Neutral Atom Lithography and Atomic Beam Imaging},
  year = {1997},
  number = {15},
  month = {1997-09-01},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}