@misc{4801, author = {Hao Zhang and D Ott and Wei Chu}, title = {An Areal Isotropic Spline Filter for Surface Metrology}, year = {2015}, month = {2015-04-01}, publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/jres.120.006}, language = {en}, }