@article{47216,
  author = {Norman Sanford and F Brizuela and Kristine Bertness},
  title = {High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers},
  year = {2008},
  number = {86},
  month = {2008-07-21},
  publisher = {Journal of Physics Conference Proceedings},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908697},
  language = {en},
}