@article{46381, author = {Konrad Rykaczewski and Owen Hildreth and Ching Wong and Andrei Fedorov and John Scott}, title = {Guided three-dimensional catalyst folding during Metal assisted Chemical Etching of Silicon}, year = {2011}, number = {11}, month = {2011-06-28}, publisher = {Nano Letters}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908006}, language = {en}, }