@conference{42231,
  author = {Ronald Dixson and Donald Chernoff and Shihua Wang and Theodore Vorburger and Ndubuisi Orji and Siew-Leng Tan and Joseph Fu},
  title = {Interlaboratory Comparison of Traceable Atomic Force Microscope Pitch Measurements},
  year = {2010},
  month = {2010-06-14},
  publisher = {2010 SCANNING/SPIE Proceedings, Monterey, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905745},
  language = {en},
}