@conference{42216,
  author = {Theodore Vorburger and Albert Hilton and Ronald Dixson and Ndubuisi Orji and J. Powell and A. Trunek and P. Neudeck and P. Abel},
  title = {Calibration of 1 nm SiC Step Height Standards},
  year = {2010},
  number = {7638},
  month = {2010-03-31},
  publisher = {7638: Metrology, Inspection, and Process Control for Microlithography XXIV,
Conference 7638, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905193},
  language = {en},
}