@conference{42161,
  author = {James Potzick and Ronald Dixson and Richard Quintanilha and Michael Stocker and Andras Vladar and Egbert Buhr and Bernd Bodermann and Wolfgang Hassler-Grohne and Harald Bosse and C.G. Frase},
  title = {International photomask linewidth comparison by NIST and PTB},
  year = {2008},
  month = {2008-10-17},
  publisher = {Proceedings SPIE Photomask 2008 (BACUS), Monterey, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824713},
  language = {en},
}