@conference{39201,
  author = {Richard Silver and Nien Zhang and Bryan Barnes and Jing Qin and Hui Zhou and Ronald Dixson},
  title = {A Bayesian Statistical Model for Hybrid Metrology to Improve Measurement Accuracy},
  year = {2011},
  number = {8083},
  month = {2011-07-31},
  publisher = {Modeling Aspects in Optical Metrology, Munich, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908377},
  language = {en},
}