@conference{38791,
  author = {George Mulholland and Nelson Bryner and Walter Liggett and B Scheer and R. Goodall},
  title = {Selection of Calibration Particles for Scanning Surface Inspection Systems},
  year = {1996},
  number = {2862},
  month = {1996-08-08},
  publisher = {International Society for Optical Engineering (SPIE), Denver, CO},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910979},
  language = {en},
}