@conference{37096,
  author = {Ravikiran Attota and Abraham Arceo and Benjamin Bunday and Victor Vertanian},
  title = {Patterned Defect & CD Metrology by TSOM Beyond the 22 nm Node},
  year = {2012},
  month = {2012-04-10},
  publisher = {Metrology Inspection and Process Control, San Jose, CA},
  language = {en},
}