@conference{37071,
  author = {Ravikiran Attota},
  title = {Three-dimensional Nanometrology with TSOM Optical Method},
  year = {2011},
  month = {2011-12-10},
  publisher = {An International Conference on PRECISION, MESO, MICRO, AND NANO ENGINEERING, Pune, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910045},
  language = {en},
}