@article{35791,
  author = {James Liddle and Gregg Gallatin},
  title = {Lithography, Metrology and Nanomanufacturing},
  year = {2011},
  month = {2011-04-12},
  publisher = {Nanoscale},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907745},
  language = {en},
}