@conference{3296,
  author = {Chukwudi Okoro and Lyle Levine and Yaw Obeng and Ruqing Xu},
  title = {Experimentally, How Does Cu TSV Diameter Influence its Stress State?},
  year = {2015},
  month = {2015-05-27},
  publisher = {Proceeding of IEEE Electronic Components and Technology Conference (ECTC), San Diego, CA},
  language = {en},
}