@conference{32121, author = {Petr Cizmar and Andras Vladar and Michael Postek}, title = {Advances in Modeling of Scanning Charged-Particle-Microscopy Images}, year = {2010}, number = {7729}, month = {2010-09-19}, publisher = {2010 SCANNING/SPIE Proceedings, Monterey, CA}, language = {en}, }