@conference{30906,
  author = {Jing Qin and Hui Zhou and Bryan Barnes and Francois Goasmat and Ronald Dixson and Richard Silver},
  title = {Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization},
  year = {2012},
  number = {8466},
  month = {2012-10-11},
  publisher = {Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA},
  doi = {https://doi.org/10.1117/12.946120},
  language = {en},
}