@conference{27306,
  author = {Jing Qin and Hui Zhou and Bryan Barnes and Ronald Dixson and Richard Silver},
  title = {3-D Optical Metrology of Finite sub-20 nm Dense Arrays using Fourier Domain Normalization},
  year = {2013},
  month = {2013-03-25},
  publisher = {2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics , Gaithersburg, MD},
  language = {en},
}