@article{26141,
  author = {Michael Gaither and Richard Gates and Rebecca Kirkpatrick and Robert Cook and Frank DelRio},
  title = {Etching process effects on surface structure, fracture strength, and reliability of single-crystal silicon theta-like specimens},
  year = {2013},
  month = {2013-05-30},
  publisher = {Journal of Microelectromechanical Systems},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912389},
  language = {en},
}