@conference{26051, author = {Chukwudi Okoro and Yaw Obeng and Jan Obrzut and Pavel Kabos and Klaus Hummler}, title = {Use of RF-Based Technique as a Metrology Tool for TSV Reliability Analysis}, year = {2013}, month = {2013-05-28}, publisher = {Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV}, language = {en}, }