@book{220131,
  author = {Michael Postek and Andras Vladar and John Kramar and L Stern and John Notte and Sean McVey},
  title = {Helium Ion Microscopy: A New Technique for Semiconductor Metrology and Nanotechnology},
  year = {2007},
  month = {2007-01-01},
  publisher = {, },
  language = {en},
}