@article{212826,
  author = {Atif Imtiaz and Thomas Wallis and Pavel Kabos},
  title = {Near-Field Scanning Microwave Microscopy: An Emerging Research Tool for Nanoscale Metrology},
  year = {2014},
  number = {15},
  month = {2014-01-01},
  publisher = {IEEE Microwave Magazine},
  doi = {https://doi.org/10.1109/MMM.2013.2288711},
  language = {en},
}