@article{21096,
  author = {Bryan Barnes and Martin Sohn and Francois Goasmat and Hui Zhou and Andras Vladar and Richard Silver and Abraham Arceo},
  title = {Three-dimensional deep sub-wavelength defect detection using (lambda) = 193 nm optical microscopy},
  year = {2013},
  number = {21},
  month = {2013-10-25},
  publisher = {Optics Express},
  doi = {https://doi.org/10.1364/OE.21.026219},
  language = {en},
}